Microelectromechanical devices driven by thermosalient effects

The state-of-the-art microelectromechanical systems (MEMSs) tech-nology faces challenges in meeting the requirements of the next decade regarding improved performance, functionality, and power consumption, which can be addressed by resorting to new actuating materials. Dynamic molecular single crystals have been explored as actuating elements; however, difficulties with control over the ge-ometry and fabrication of these materials has limited their scalabil-ity and application. Here, we present dynamic molecular crystals driven by thermosalient phase transitions as alternative materials in MEMSs technology with swift and amplified mechanical response. This work employs a thermally deposited stable polycrystalline thin film of L-pyroglutamic acid to fabricate a prototypical thermo-salient organic crystal-MEMS (TS-OC-MEMS). The organic thin film undergoes a reversible and cyclable martensitic phase transition that drives the deformation. The TS-OC-MEMSs provide a reliable and scalable solution to utilize dynamic molecular crystals in robust applications and circumvent the challenges that have long stifled their application as actuating materials.

Automated summary

This study proposes a method of using dynamic molecular crystals driven by thermosalient phase transitions as alternative materials in MEMS technology, with swift and amplified mechanical response. By preparing a thermally stable polycrystalline thin film and undergoing reversible and cyclable martensitic phase transitions, the challenges of applying dynamic molecular crystals are addressed.