Journal
COATINGS
Volume 13, Issue 1, Pages -Publisher
MDPI
DOI: 10.3390/coatings13010127
Keywords
multilayers; magnetron sputtering; hardness; toughness; interfaces
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In this study, Mo/VC multilayers with constant period and different modulation ratios were deposited by dc magnetron sputtering. The microstructure and mechanical properties of the multilayers were investigated using XRD, TEM, Nanoindent, and Microindent methods. The results showed that the hardness remained high while the toughness increased with changing modulation ratio. The enhanced properties were attributed to the interfaces and lamellated structure. The formation mechanism of the interface was also determined using first-principles method.
In the present work, Mo/VC multilayers with constant period (10 nm) and different modulation ratios (from 6:4 to 9:1) were deposited by dc magnetron sputtering. We investigated the microstructure and mechanical properties of Mo/VC multilayers. XRD and TEM results indicated that Mo was a bcc structure and VC was a NaCl B1 (fcc) structure. An HRTEM image revealed the coherent interfaces between the Mo and VC layers. Hardness and toughness were studied using the Nanoindent and Microindent methods, respectively. It was found that the multilayers hardness remained as high as similar to 22 GPa, while the toughness increased from 2.91 to 4.70 MPa center dot m(1/2) and the modulation ratio varied from 6:4 to 9:1. The enhancement of both hardness and toughness is attributed to the interfaces and the lamellated structure. The first-principles method was also used to determine the most stable interface model and the formation mechanism of the interface between the Mo and VC layers.
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