Journal
NANO ENERGY
Volume 103, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.nanoen.2022.107758
Keywords
Tribo-electric-nano-generator; MEMS; Shock sensing; Actuators; Self-powered; Energy harvester
Categories
Funding
- National Science Foundation (NSF) , United States of America [1919608]
- Cornell NanoScale Science and Technology Facility, United States of America
- National Science Foundation [NNCI-2025233]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [1919608] Funding Source: National Science Foundation
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This work demonstrates zero-power shock sensing using a micro-triboelectric generator and MEMS electrostatic actuator system. The generator converts mechanical shock into voltage, which is then utilized to actuate a MEMS switch. Through the integration of MEMS technology, the fabrication process of a Triboelectric-Nano-Generator (TENG) is presented for the first time. The TENG shows the ability to provide a voltage difference of up to 0.4V at 2.3g acceleration and successfully actuates a cantilevered MEMS switch.
This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where the mechanical shock to the generator causes it to produce voltage, this voltage is used to actuate a Micro-Electro-Mechanical-system (MEMS) switch. For the first time, we present the fabrication process of a Triboelectric-Nano-Generator (TENG) with MEMS technology. The MEMS-TENG has a suspended 1.5 mm x 1.5 mm plate separated by 2 mu m from the substrate. The generator is a triboelectric transducer made of a suspended Al micro-plate above a polyimide (PI) thin layer that is covered by another Al layer in the back. In case the shock is sufficiently strong, the micro-plate hits its substrate. As a result of the impact, electrification happens and PI gets negatively charged, while the Al gets positively charged. Connecting the generator to a MEMS switch, we use the generated voltage to actuate a MEMS switch. The TENG was able to supply voltage difference up to 0.4 V at 2.3g. We use the MEMS-TENG to actuate a cantilevered MEMS switch (500 x 20 x 2 mu m) separated by a 2 mu m gap from a fixed bottom electrode. Triboelectric generators are known for high voltages and low currents, which makes them ideal for integration with MEMS electrostatic devices that require ultra-low power to operate. Our feasibility study opens doors to billions of innovative devices that can be created from this synergistic combination.
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