Journal
MICROMACHINES
Volume 13, Issue 12, Pages -Publisher
MDPI
DOI: 10.3390/mi13122116
Keywords
optical devices; multimode interference; variable optical attenuator; 3D integration
Categories
Funding
- National Key Research and Development Program of China
- [2019YFB2203004]
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A three-dimensional polymer variable optical attenuator (VOA) is proposed in this paper for monolithic integration of silica and polymer-based planar lightwave circuits (PLCs). Through optical and thermal analyses, a compact and high-performance VOA is achieved, showing great potential for various applications.
Low-power-consumption optical devices are crucial for large-scale photonic integrated circuits (PICs). In this paper, a three-dimensional (3D) polymer variable optical attenuator (VOA) is proposed. For monolithic integration of silica and polymer-based planar lightwave circuits (PLCs), the vertical VOA is inserted between silica-based waveguides. Optical and thermal analyses are performed through the beam propagation method (BPM) and finite-element method (FEM), respectively. A compact size of 3092 mu m x 4 mu m x 7 mu m is achieved with a vertical multimode interference (MMI) structure. The proposed VOA shows an insertion loss (IL) of 0.58 dB and an extinction ratio (ER) of 21.18 dB. Replacing the graphene heater with an aluminum (Al) electrode, the power consumption is decreased from 29.90 mW to 21.25 mW. The rise and fall time are improved to 353.85 mu s and 192.87 mu s, respectively. The compact and high-performance VOA shows great potential for a variety of applications, including optical communications, integrated optics, and optical interconnections.
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