Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors

Graphene membranes act as temperature sensors in nanoelectromechanical devices due to their excellent thermal and high-temperature resistance properties. Experimentally, reports on the sensing performance of graphene mainly focus on the temperature interval under 400 K. To explore the sensing performance of graphene temperature sensors at higher temperature intervals, micro-fabricated single-layer graphene on a SiNX substrate is presented as temperature sensors by semiconductor technology and its electrical properties were measured. The results show that the temperature coefficient of the resistance value is 2.07 x 10(-3) in the temperature range of 300-450 K and 2.39 x 10(-3) in the temperature range of 450-575 K. From room temperature to high temperature, the metal characteristics are presented, and the higher TCR obtained at higher temperature interval is described and analyzed by combining Boltzmann transport equation and thermal expansion theory. These investigations provide further insight into the temperature characteristics of graphene.

Automated summary

Graphene membranes show potential as temperature sensors in nanoelectromechanical devices due to their excellent thermal properties. A study investigates the sensing performance of graphene temperature sensors at higher temperature intervals. The results demonstrate a high temperature coefficient of resistance in the range of 300-575 K. This finding provides further understanding of the temperature characteristics of graphene.