4.5 Article

Capacitively-Coupled Resonators for Terahertz Planar-Goubau-Line Filters

Journal

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TTHZ.2022.3220599

Keywords

Resonators; Resonator filters; Electromagnetic waveguides; Resonant frequency; Planar waveguides; Coplanar waveguides; Band-pass filters; Filters; on-wafer measurements; periodic structures; planar Goubau line; scattering parameters; silicon membrane; single-metal strip; terahertz (THz) waveguides; vector network analyzer (VNA)

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Planar Goubau lines show promise for terahertz (THz) applications, but existing filters lack clear design procedures. In this study, we propose a design for a bandpass/bandstop filter by periodically loading the line with capacitively-coupled lambda/2 resonators. The filter's working principle is explained using a transmission-line model. We fabricated and tested a passband filter centered at 0.9 THz on a 10-µm silicon-membrane substrate, demonstrating good agreement between measurements and simulations.
planar Goubau lines show promising potential for terahertz (THz) applications. However, a single-wire waveguide exhibits less design freedom than standard multiconductor lines, which is a significant constraint for realizing standard components. Existing filters for planar-Goubau-line lack clear design procedures preventing the synthesis of an arbitrary filter response. In this work, we present a design for a bandpass/bandstop filter for planar Goubau line by periodically loading the line with capacitively-coupled lambda/2 resonators, which can be easily tuned by changing their electrical length. The filter's working principle is explained by a proposed transmission-line model. We designed and fabricated a passband filter centered at 0.9 THz on a 10-mu m silicon-membrane substrate and compared measurement results between 0.5 and 1.1 THz to electromagnetic simulations, showing an excellent agreement in both S-11 and S-21. The measured pass band has an insertion loss of 7 dB and a 3-dB bandwidth of 31%. Overall, the proposed filter design has a good performance while having a simple design procedure.

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