Journal
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY
Volume 12, Issue 6, Pages 667-672Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TTHZ.2022.3202031
Keywords
Lenses; Antenna measurements; Silicon; Fabrication; Laser ablation; Measurement by laser beam; Antennas; Anti-reflection coating; dielectric lens antennas; matching layer; submillimeter-wave
Funding
- ERC Starting Grant [LAA-THz-CC 639749]
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This article presents the design, fabrication, and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer, based on silicon frusta, covers more than an octave of bandwidth and outperforms the commonly-used parylene-C matching layer.
We present the design, fabrication and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer is based on silicon frusta (truncated pyramids) on top of the lens array fabricated by means of laser ablation. This matching layer is advantageous over quarter-wavelength dielectric matching layers since it covers more than an octave of bandwidth. We compare the performance of this matching layer with the commonly-used parylene-C matching layer at the center of the targetted band (500 GHz) in a lens-antenna integrated system. We measure a 1.6 dB higher transmission of the proposed silicon frusta matching compared to the parylene-C matching layer.
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