4.5 Article

GaAs//Si Multijunction Solar Cells Fabricated via Mechanical Stack Technology Using Pd Nanoparticles and Metal-Assisted Chemical Etching

Journal

IEEE JOURNAL OF PHOTOVOLTAICS
Volume 13, Issue 1, Pages 105-112

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOTOV.2022.3215263

Keywords

Silicon; Bonding; Photovoltaic cells; Etching; Surface resistance; Stacking; Photoconductivity; Bonding technology; III-V solar cells; mechanical stacking; metal-assisted chemical etching (MacEtch); multijunction solar cells (MJSCs); Si solar cells

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This article examines a highly efficient three-junction solar cell using a stacking method with Pd nanoparticles and metal-assisted chemical etching. The technology improves the bonding resistivity between GaAs-based and Si cells and aids in managing the bonding gap width. The proposed method has potential applications in connecting Si-based cells.
Multijunction solar cells (MJSCs) have attracted attention as next-generation solar cells. In particular, GaAs//Si-based MJSCs are highly efficient with low cost and are expected to gain new applications, such as on-vehicle integrations. In this article, we examined a highly efficient In0.49Ga0.51P/Al0.06Ga0.94As//Si three-junction solar cell. The bottom Si cell has a tunnel oxide passivated contact structure. The key technology used to fabricate this solar cell is a stacking method that uses Pd nanoparticles (Pd-NPs) and metal-assisted chemical etching (MacEtch) for the bonding interface, which is improved from our previous smart stack technology. The MacEtch method has a feature of selective etching for Si around a metal body. Pd-NPs selectively invade the Si cell through the surface of the Si oxide layer, thereby improving the bonding resistivity between the GaAs-based cell and Si cell. Further, this technology aids the management of the bonding gap width by controlling the Pd-NP invasion depth. As a result, an efficiency of 27.6% for the aperture area was attained. The proposed technology is useful for the connection of Si-based cells, enhancing the development of GaAs//Si-based tandem solar cells.

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