Journal
PHYSICAL REVIEW X
Volume 12, Issue 4, Pages -Publisher
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevX.12.041036
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Funding
- W. M. Keck Foundation
- Alexander von Humboldt foundation
- Joint Center for Extreme Photonics
- U.S. Defense Threat Reduction [1-19-1-0026]
- U.S. Air Force Office of Scientific Research [FA9550-16-1-0109]
- Natural Sciences and Engineering Research Council of Canada
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This study successfully focuses extreme ultraviolet light to a waist radius of 150 nm, with 18% focusing efficiency, by integrating coherent short-wavelength high-order harmonics with a high-numerical-aperture nanostructured focusing element. Future developments may lead to nanoscale laser ablation and miniaturization of extreme ultraviolet coherent sources on a chip.
Extreme ultraviolet light delivering radiation with a wavelength shorter than approximately 100 nm is now available from solid-state sources. However, despite exceptional progress, efficient focusing of extreme ultraviolet photons to their ultimate diffraction limit remains a formidable challenge because of the precision of the focusing by curved, optical surfaces. Here we integrate coherent short-wavelength highorder harmonics from a MgO crystal, with a high-numerical-aperture, nanostructured, focusing element etched onto the surface of the crystal itself. We focus extreme ultraviolet light, seventh harmonic of an 800-nm laser, with a zone plate of numerical aperture 0.35, down to a waist radius of 150 nm, with 18% focusing efficiency. The estimated intensity approaches 107 W/cm2. Future developments may demonstrate nanoscale laser ablation and miniaturization of extreme ultraviolet coherent sources on a chip.
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