Related references
Note: Only part of the references are listed.Efficient and Broadband Trident Spot-Size Convertor for Thin-Film Lithium Niobate Integrated Device
Xuerui Liang et al.
IEEE PHOTONICS TECHNOLOGY LETTERS (2023)
Quantum optics of soliton microcombs
Melissa A. Guidry et al.
NATURE PHOTONICS (2022)
Compact low-birefringence polarization beam splitter using vertical-dual-slot waveguides in silicon carbide integrated platforms
Xiaodong Shi et al.
PHOTONICS RESEARCH (2022)
Octave-spanning microcomb generation in 4H-silicon-carbide-on-insulator photonics platform
Lutong Cai et al.
PHOTONICS RESEARCH (2022)
Integrated silicon carbide electro-optic modulator
Keith Powell et al.
NATURE COMMUNICATIONS (2022)
Impact of Mechanical Stress and Nitrogen Doping on the Defect Distribution in the Initial Stage of the 4H-SiC PVT Growth Process
Johannes Steiner et al.
MATERIALS (2022)
Silicon Carbide Photonics Bridging Quantum Technology
Stefania Castelletto et al.
ACS PHOTONICS (2022)
High-Performance Polarization-Independent Beam Splitters and MZI in Silicon Carbide Integrated Platforms for Single-Photon Manipulation
Xiaodong Shi et al.
JOURNAL OF LIGHTWAVE TECHNOLOGY (2022)
Exceptional points at bound states in the continuum in photonic integrated circuits
Haoye Qin et al.
NANOPHOTONICS (2022)
Defect Inspection Techniques in SiC
Po-Chih Chen et al.
NANOSCALE RESEARCH LETTERS (2022)
Integrated photonics on thin-film lithium niobate
Di Zhu et al.
ADVANCES IN OPTICS AND PHOTONICS (2021)
Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films
Meng Liu et al.
CERAMICS INTERNATIONAL (2021)
Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform
Tianren Fan et al.
OPTICS LETTERS (2021)
Extended defects in 3C-SiC: Stacking faults, threading partial dislocations, and inverted domain boundaries
Massimo Zimbone et al.
ACTA MATERIALIA (2021)
Overgrowth of Protrusion Defects during Sublimation Growth of Cubic Silicon Carbide Using Free-Standing Cubic Silicon Carbide Substrates
Michael Schoeler et al.
CRYSTAL GROWTH & DESIGN (2021)
Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform
Chengli Wang et al.
OPTICS LETTERS (2021)
New Approaches and Understandings in the Growth of Cubic Silicon Carbide
Francesco La Via et al.
MATERIALS (2021)
High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics
Chengli Wang et al.
LIGHT-SCIENCE & APPLICATIONS (2021)
Polarization and spatial mode dependent four-wave mixing in a 4H-silicon carbide microring resonator
Xiaodong Shi et al.
APL PHOTONICS (2021)
Dual-pump Optical Parametric Oscillation in a 4H-SiC-on-insulator Microring Resonator
Xiaodong Shi et al.
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC) (2021)
Influence of Al2O3, SiC and B4C covalent multilayer PVD coating on surface properties of HSS rod
R. Manivannan et al.
MATERIALS TODAY-PROCEEDINGS (2021)
Investigation of the Growth Kinetics of SiC Crystals during Physical Vapor Transport Growth by the Application of In Situ 3D Computed Tomography Visualization
Matthias Arzig et al.
ADVANCED ENGINEERING MATERIALS (2020)
Integrated gallium phosphide nonlinear photonics
Dalziel J. Wilson et al.
NATURE PHOTONICS (2020)
Influence of the growth interface shape on the defect characteristics in the facet region of 4H-SiC single crystals
Matthias Arzig et al.
JOURNAL OF CRYSTAL GROWTH (2020)
On the importance of dislocation flow in continuum plasticity models for semiconductor materials
Binh Duong Nguyen et al.
JOURNAL OF CRYSTAL GROWTH (2020)
4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics
Daniil M. Lukin et al.
NATURE PHOTONICS (2020)
High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing
Keith Powell et al.
OPTICS EXPRESS (2020)
High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform
Tianren Fan et al.
OPTICS LETTERS (2020)
Research on adhesion strength and optical properties of SiC films obtained via RF magnetron sputtering
Wang Yizhe et al.
CHINESE JOURNAL OF PHYSICS (2020)
Effect of plasma power on properties of hydrogenated amorphous silicon carbide hardmask films deposited by PECVD
Sungyool Kwon et al.
VACUUM (2020)
Dependence of Photoluminescence Emission on Excitation Power and Temperature in Highly Doped 6H-SiC
Abebe T. Tarekegne et al.
PHYSICAL REVIEW APPLIED (2020)
Purcell Enhancement of a Single Silicon Carbide Color Center with Coherent Spin Control
Alexander L. Crook et al.
NANO LETTERS (2020)
Wafer-scale 4H-silicon carbide-on-insulator (4H-SiCOI) platform for nonlinear integrated optical devices
Ailun Yi et al.
OPTICAL MATERIALS (2020)
Optical parametric oscillation in silicon carbide nanophotonics
Melissa A. Guidry et al.
OPTICA (2020)
High efficiency four wave mixing and optical bistability in amorphous silicon carbide ring resonators
Peng Xing et al.
APL PHOTONICS (2020)
Integrated Quantum Photonics with Silicon Carbide: Challenges and Prospects
Daniil M. Lukin et al.
PRX QUANTUM (2020)
Formation and multiplication of basal plane dislocations during physical vapor transport growth of 4H-SiC crystals
Takahiro Nakano et al.
JOURNAL OF CRYSTAL GROWTH (2019)
Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering
T. Taysanoglu et al.
THIN SOLID FILMS (2019)
CMOS-Compatible PECVD Silicon Carbide Platform for Linear and Nonlinear Optics
Peng Xing et al.
ACS PHOTONICS (2019)
Nonclassical Optical Bistability and Resonance-Locked Regime of Photon- Pair Sources Using Silicon Microring Resonator
Kai Guo et al.
PHYSICAL REVIEW APPLIED (2019)
High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator
Yi Zheng et al.
OPTICS EXPRESS (2019)
Zero-Order Second Harmonic Generation from AlGaAs-on-Insulator Metasurfaces
Giuseppe Marino et al.
ACS PHOTONICS (2019)
Structural characterization of the grown crystal/seed interface of physical vapor transport grown 4H-SiC crystals using Raman microscopy and x-ray topography
Kentaro Shioura et al.
JOURNAL OF CRYSTAL GROWTH (2019)
A comparative study of high-quality C-face and Si-face 3C-SiC(111) grown on off-oriented 4H-SiC substrates
Yuchen Shi et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2019)
Growth of Large-Area, Stress-Free, and Bulk-Like 3C-SiC (100) Using 3C-SiC-on-Si in Vapor Phase Growth
Philipp Schuh et al.
MATERIALS (2019)
Limitations during Vapor Phase Growth of Bulk (100) 3C-SiC Using 3C-SiC-on-SiC Seeding Stacks
Philipp Schuh et al.
MATERIALS (2019)
Ultrahigh-Q photonic crystal nanocavities based on 4H silicon carbide
Bong-Shik Song et al.
OPTICA (2019)
Multichannel Photon-Pair Generation with Strong and Uniform Spectral Correlation in a Silicon Microring Resonator
Xiaodong Shi et al.
PHYSICAL REVIEW APPLIED (2019)
4H-SiC microring resonators for nonlinear integrated photonics
Yi Zheng et al.
OPTICS LETTERS (2019)
High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform
Xi Wu et al.
OPTICS LETTERS (2019)
Influence of Morphological Changes in a Source Material on the Growth Interface of 4H-SiC Single Crystals
Matthias Arzig et al.
MATERIALS (2019)
Temperature Investigation on 3C-SiC Homo-Epitaxy on Four-Inch Wafers
Ruggero Anzalone et al.
MATERIALS (2019)
Optimization of the SiC Powder Source Material for Improved Process Conditions During PVT Growth of SiC Boules
Oda Marie Ellefsen et al.
MATERIALS (2019)
20 years of developments in optical frequency comb technology and applications
Tara Fortier et al.
COMMUNICATIONS PHYSICS (2019)
Four wave mixing in 3C SiC ring resonators
Francesco Martini et al.
APPLIED PHYSICS LETTERS (2018)
Protrusions reduction in 3C-SiC thin film on Si
Massimo Zimbone et al.
JOURNAL OF CRYSTAL GROWTH (2018)
Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films
Poreddy Chaitanya Akshara et al.
MATERIALS RESEARCH EXPRESS (2018)
Generation rate scaling: the quality factor optimization of microring resonators for photon-pair sources
Kai Guo et al.
PHOTONICS RESEARCH (2018)
Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [Invited]
David Allioux et al.
PHOTONICS RESEARCH (2018)
Nonlinear gallium phosphide nanoscale photonics [Invited]
Aude Martin et al.
PHOTONICS RESEARCH (2018)
High-Q integrated photonic microresonators on 3C-SiC-on-insulator (SiCOI) platform
Tianren Fan et al.
OPTICS EXPRESS (2018)
Review of SiC crystal growth technology
Peter J. Wellmann
SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2018)
Study on the usage of a commercial software (Comsol-Multiphysics®) for dislocation multiplication model
B. Gallien et al.
JOURNAL OF CRYSTAL GROWTH (2017)
Carbonization and transition layer effects on 3C-SiC film residual stress
R. Anzalone et al.
JOURNAL OF CRYSTAL GROWTH (2017)
Effect of sputtering power on the structure and optical band gap of SiC thin films
Yong Cheng et al.
OPTICAL MATERIALS (2017)
Linear integrated optics in 3C silicon carbide
Francesco Martini et al.
OPTICS EXPRESS (2017)
Selective Purcell enhancement of two closely linked zero-phonon transitions of a silicon carbide color center
David O. Bracher et al.
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (2017)
Power Electronic Semiconductor Materials for Automotive and Energy Saving Applications - SiC, GaN, Ga2O3, and Diamond
Peter J. Wellmann
ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE (2017)
Integration of Single-Photon Emitters into 3C-SiC Microdisk Resonators
Alexander Lohrmann et al.
ACS PHOTONICS (2017)
White Light Emission from Fluorescent SiC with Porous Surface
Weifang Lu et al.
SCIENTIFIC REPORTS (2017)
Frequency comb generation in the green using silicon nitride microresonators
Leiran Wang et al.
LASER & PHOTONICS REVIEWS (2016)
Low temperature deposition of a-SiC:H thin films applying a dual plasma source process
Tobias Frischmuth et al.
THIN SOLID FILMS (2016)
Efficient frequency comb generation in AlGaAs-on-insulator
Minhao Pu et al.
OPTICA (2016)
High-Q silicon carbide photonic-crystal cavities
Jonathan Y. Lee et al.
APPLIED PHYSICS LETTERS (2015)
Single Domain 3C-SiC Growth on Off-Oriented 4H-SiC Substrates
Valdas Jokubavicius et al.
CRYSTAL GROWTH & DESIGN (2015)
Fabrication of High-Q Nanobeam Photonic Crystals in Epitaxially Grown 4H-SiC
David O. Bracher et al.
NANO LETTERS (2015)
Modified spontaneous emission in nanophotonic structures
Matthew Pelton
NATURE PHOTONICS (2015)
Optical nonlinearities in high-confinement silicon carbide waveguides
Jaime Cardenas et al.
OPTICS LETTERS (2015)
Optimization of growth parameters for growth of high quality heteroepitaxial 3C-SiC films at 1200 °C
Martin Wilhelm et al.
THIN SOLID FILMS (2015)
Silicon-chip mid-infrared frequency comb generation
Austin G. Griffith et al.
NATURE COMMUNICATIONS (2015)
Silicon carbide photonic crystal cavities with integrated color centers
Greg Calusine et al.
APPLIED PHYSICS LETTERS (2014)
High Q silicon carbide microdisk resonator
Xiyuan Lu et al.
APPLIED PHYSICS LETTERS (2014)
RF-PECVD deposition and optical properties of hydrogenated amorphous silicon carbide thin films
Enlong Chen et al.
CERAMICS INTERNATIONAL (2014)
Three-Dimensional Modeling of Basal Plane Dislocations in 4H-SiC Single Crystals Grown by the Physical Vapor Transport Method
Bing Gao et al.
CRYSTAL GROWTH & DESIGN (2014)
Lateral Enlargement Growth Mechanism of 3C-SiC on Off-Oriented 4H-SiC Substrates
Valdas Jokubavicius et al.
CRYSTAL GROWTH & DESIGN (2014)
Advances in wide bandgap SiC for optoelectronics
Haiyan Ou et al.
EUROPEAN PHYSICAL JOURNAL B (2014)
Optical Kerr nonlinearity in a high-Q silicon carbide microresonator
Xiyuan Lu et al.
OPTICS EXPRESS (2014)
Second-harmonic generation in a silicon-carbide-based photonic crystal nanocavity
Shota Yamada et al.
OPTICS LETTERS (2014)
Green, red, and IR frequency comb line generation from single IR pump in AlN microring resonator
Hojoong Jung et al.
OPTICA (2014)
Experimental verification of the model by Klapper for 4H-SiC homoepitaxy on vicinal substrates
Birgit Kallinger et al.
JOURNAL OF APPLIED PHYSICS (2013)
Stress nature investigation on heteroepitaxial 3C-SiC film on (100) Si substrates
Ruggero Anzalone et al.
JOURNAL OF MATERIALS RESEARCH (2013)
All-optical 10 Gb/s AND logic gate in a silicon microring resonator
Meng Xiong et al.
OPTICS EXPRESS (2013)
Optical frequency comb generation from aluminum nitride microring resonator
Hojoong Jung et al.
OPTICS LETTERS (2013)
Chemical vapor deposition of amorphous silicon carbide thin films on metal surfaces using monomethylsilane gas at low temperatures
Hitoshi Habuka et al.
SURFACE & COATINGS TECHNOLOGY (2013)
Photonic crystal cavities in cubic (3C) polytype silicon carbide films
Marina Radulaski et al.
OPTICS EXPRESS (2013)
Nucleation Control of Cubic Silicon Carbide on 6H-Substrates
Remigijus Vasiliauskas et al.
CRYSTAL GROWTH & DESIGN (2012)
Degradation and Full Recovery in High-Voltage Implanted-Gate SiC JFETs Subjected to Bipolar Current Stress
Victor Veliadis et al.
IEEE ELECTRON DEVICE LETTERS (2012)
Simultaneous RZ-OOK to NRZ-OOK and RZ-DPSK to NRZ-DPSK format conversion in a silicon microring resonator
Meng Xiong et al.
OPTICS EXPRESS (2012)
Suppression of multiple photon absorption in a SiC photonic crystal nanocavity operating at 1.55 μm
Shota Yamada et al.
OPTICS EXPRESS (2012)
Silicon carbide-based photonic crystal nanocavities for ultra-broadband operation from infrared to visible wavelengths
Shota Yamada et al.
APPLIED PHYSICS LETTERS (2011)
Dependence of chemical composition and bonding of amorphous SiC on deposition temperature and the choice of substrate
Li Wang
JOURNAL OF NON-CRYSTALLINE SOLIDS (2011)
Demonstration of two-dimensional photonic crystals based on silicon carbide
Bong-Shik Song et al.
OPTICS EXPRESS (2011)
Generation of a 640 Gbit/s NRZ OTDM signal using a silicon microring resonator
Yunhong Ding et al.
OPTICS EXPRESS (2011)
Experimental investigation of thermo-optic effects in SiC and Si photonic crystal nanocavities
Shota Yamada et al.
OPTICS LETTERS (2011)
Room temperature process for chemical vapor deposition of amorphous silicon carbide thin film using monomethylsilane gas
Hitoshi Habuka et al.
SURFACE & COATINGS TECHNOLOGY (2011)
Structural changes in tungsten wire and their effect on the properties of hydrogenated nanocrystalline cubic silicon carbide thin films
Akimori Tabata et al.
THIN SOLID FILMS (2011)
Substrate temperature effect on the SiC passivation layer synthesized by an RF magnetron sputtering method
Jae Keun Seo et al.
THIN SOLID FILMS (2011)
CMOS-compatible integrated optical hyper-parametric oscillator
L. Razzari et al.
NATURE PHOTONICS (2010)
Analysis of Basal Plane Bending and Basal Plane Dislocations in 4H-SiC Single Crystals
Noboru Ohtani et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2009)
On the lattice parameters of silicon carbide
M. Stockmeier et al.
JOURNAL OF APPLIED PHYSICS (2009)
Comparative study of the role of the nucleation stage on the final crystalline quality of (111) and (100) silicon carbide films deposited on silicon substrates.
M. Portail et al.
JOURNAL OF APPLIED PHYSICS (2009)
Importance of H2 gas for growth of hot-wire CVD nanocrystalline 3C-SiC from SiH4/CH4/H2
Yoshiki Hoshide et al.
THIN SOLID FILMS (2009)
Growth of silicon carbide thin films by hot-wire chemical vapor deposition from SiH4/CH4/H2
Akimori Tabata et al.
THIN SOLID FILMS (2009)
Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells
F. Finger et al.
THIN SOLID FILMS (2009)
Influence of gas pressure on low-temperature preparation and film properties of nanocrystalline 3C-SiC thin films by HW-CVD using SiH4/CH4/H2 system
Yusuke Komura et al.
THIN SOLID FILMS (2008)
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
V. Cimalla et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2007)
A new degradation mechanism in high-voltage SiC power MOSFETs
Anant Agarwal et al.
IEEE ELECTRON DEVICE LETTERS (2007)
Strain and wafer curvature of 3C-SiC films on silicon: influence of the growth conditions
M. Zielinski et al.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2007)
Multiphase structure of hydrogen diluted a-SiC:H deposited by HWCVD
Bibhu P. Swain et al.
MATERIALS CHEMISTRY AND PHYSICS (2006)
CVD growth of 3C-SiC on 4H/6H mesas
Philip G. Neudeck et al.
CHEMICAL VAPOR DEPOSITION (2006)
Reducing planar defects in 3C-SiC
Hiroyuki Nagasawa et al.
CHEMICAL VAPOR DEPOSITION (2006)
Low substrate temperature deposition of crystalline SiC using HWCVD
S Klein et al.
THIN SOLID FILMS (2006)
Surface and optical analysis of SiCx films prepared by RF-RMS technique
A Mahmood et al.
DIAMOND AND RELATED MATERIALS (2006)
Deposition of SiC filmsby ion-enhanced plasma chemical vapor deposition using tetramethylsilane plus H2
M Yoshino et al.
THIN SOLID FILMS (2005)
Surface morphology of α-SIC coatings deposited by RF magnetron sputtering
HD Tang et al.
SURFACE & COATINGS TECHNOLOGY (2005)
Ultra-high-Q photonic double-heterostructure nanocavity
BS Song et al.
NATURE MATERIALS (2005)
Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics
H Philipp et al.
ELECTRONICS LETTERS (2004)
Parameters determining crystallinity in β-SiC thin films prepared by catalytic chemical vapor deposition
Q Zhao et al.
JOURNAL OF CRYSTAL GROWTH (2004)
Micropipes and the closure of axial screw dislocation cores in silicon carbide crystals
WM Vetter et al.
JOURNAL OF APPLIED PHYSICS (2004)
Technological breakthroughs in growth control of silicon carbide for high power electronic devices
H Matsunami
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS (2004)
Hydrogenated amorphous and crystalline SiC thin films grown by RF-PECVD and thermal MOCVD; comparative study of structural and optical properties
CK Jung et al.
SURFACE & COATINGS TECHNOLOGY (2003)
Third-order nonlinearities in silicon at telecom wavelengths
M Dinu et al.
APPLIED PHYSICS LETTERS (2003)
Different index contrast silica-on-silicon waveguides by PECVD
HY Ou
ELECTRONICS LETTERS (2003)
Efficient second-harmonic generation by scattering from porous gallium phosphide
LA Golovan' et al.
JETP LETTERS (2003)
Thermal system design and dislocation reduction for growth of wide band gap crystals: application to SiC growth
RH Ma et al.
JOURNAL OF CRYSTAL GROWTH (2003)
Transition from brittleness to ductility in SiC
P Pirouz et al.
JOURNAL OF PHYSICS-CONDENSED MATTER (2002)
Structural changes of tungsten heating filaments during CVD of diamond
E Zeiler et al.
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING (2002)
Diamond-like amorphous carbon
J Robertson
MATERIALS SCIENCE & ENGINEERING R-REPORTS (2002)
Growth kinetics and thermal stress in the sublimation growth of silicon carbide
RH Ma et al.
CRYSTAL GROWTH & DESIGN (2002)
A low-temperature CVD process for silicon carbide MEMS
CR Stoldt et al.
SENSORS AND ACTUATORS A-PHYSICAL (2002)
Nucleation of threading dislocations in sublimation grown silicon carbide
EK Sanchez et al.
JOURNAL OF APPLIED PHYSICS (2002)
A comprehensive study of SiC growth processes in a VPE reactor
T Chassagne et al.
THIN SOLID FILMS (2002)
Hexagonal voids and the formation of micropipes during SiC sublimation growth
TA Kuhr et al.
JOURNAL OF APPLIED PHYSICS (2001)
Advances in the molecular-beam epitaxial growth of artificially layered heteropolytypic structures of SiC
A Fissel et al.
APPLIED PHYSICS LETTERS (2000)
Micropipes in silicon carbide crystals: Do all screw dislocations have open cores?
WM Vetter et al.
JOURNAL OF MATERIALS RESEARCH (2000)
In situ visualization and analysis of silicon carbide physical vapor transport growth using digital X-ray imaging
PJ Wellmann et al.
JOURNAL OF CRYSTAL GROWTH (2000)
Global numerical simulation of heat and mass transfer for SiC bulk crystal growth by PVT
M Selder et al.
JOURNAL OF CRYSTAL GROWTH (2000)
Formation of thermal decomposition cavities in physical vapor transport of silicon carbide
EK Sanchez et al.
JOURNAL OF ELECTRONIC MATERIALS (2000)
Share Paper
