Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 49, Issue 11, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/49/11/115108
Keywords
titanium dioxide (TiO2); silver (Ag); sputtering current; deposition rate
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Funding
- 'National Young 1000 Talents' Programme
- National Natural Science Foundation of China [51472149]
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TiO2/Ag/TiO2 (TAT) multilayer transparent conducting electrodes were deposited onto glass substrates by room temperature sputtering. The impact of Ag sputtering current on the film morphology, and the optical and electrical properties were discussed. The increase in the sputtering current led to a more continuous Ag middle layer. As the Ag middle layer became continuous, the TAT electrodes had lower sheet resistance and higher transmittance. In addition, an optimized TAT electrode with a figure of merit of 15.97x10(-2)Omega(-1) was obtained at an Ag thickness of 16 nm and a sputtering current of 0.48 A. Finally, organic photodetectors were also fabricated based on TAT electrodes and the performance is comparable to reference devices with commercially purchased Sn-doped In2O3 (ITO) electrodes.
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