Journal
THIN SOLID FILMS
Volume 763, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2022.139580
Keywords
Ellipsometry; Polarimetry; Phase -change materials
Categories
Funding
- European Union [899598-PHEMTRONICS]
- European Regional Development Fund [CZ.02.1.01/0.0/0.0/16-019/0000789, CZ.02.1.01/0.0/0.0/15-003/0000447]
- Czech Ministry of Education, Youth and Sport [LM2018141]
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This paper discusses the importance and applications of polarized light reflection techniques in the characterization of phase-change materials, which can provide information about the extinction coefficient of PCMs and mapping anisotropies.
This paper discusses the fundamentals, applications, potential and limitations of polarized light reflection techniques for the characterization of phase-change materials (PCMs). These techniques include spectroscopic ellipsometry, time-resolved ellipsometry and imaging ellipsometry as well as polarimetry. We explore the ca-pabilities of spectroscopic ellipsometry in the determination of the extinction coefficient of PCMs and the ca-pabilities of imaging ellipsometry to characterize PCMs. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about crystalli-zation/amorphization kinetics and mapping anisotropies.
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