4.8 Article

Salt-Assisted Low-Temperature Growth of 2D Bi2O2Se with Controlled Thickness for Electronics

Journal

SMALL
Volume 19, Issue 10, Pages -

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.202206648

Keywords

2D materials; salt-assisted chemical vapor deposition (CVD); millimeter-size single crystals; Bi2O2Se; field-effect transistors; stability

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A low-temperature salt-assisted chemical vapor deposition method was used to grow single-domain Bi2O2Se on a millimeter scale with multilayer to monolayer thickness. The layer-dependent Raman spectroscopy of Bi2O2Se was systematically investigated, showing a redshift of the A(1g) mode at 162.4 cm(-1). The environmental stability of approximately 2.4 nm thick Bi2O2Se was confirmed after exposure to air for 1.5 years. The backgated field effect transistor based on a few-layered Bi2O2Se exhibited decent carrier mobility (approximately 287 cm(2) V(-1)s(-1)) and an ON/OFF ratio of up to 10(7), indicating a technique for growing large-domain thickness controlled Bi2O2Se single crystals for electronics.
Bi2O2Se is the most promising 2D material due to its semiconducting feature and high mobility, making it propitious channel material for high-performance electronics that demands highly crystalline Bi2O2Se at low-growth temperature. Here, a low-temperature salt-assisted chemical vapor deposition approach for growing single-domain Bi2O2Se on a millimeter scale with thicknesses of multilayer to monolayer is presented. Because of the advantage of thickness-dependent growth, systematical scrutiny of layer-dependent Raman spectroscopy of Bi2O2Se from monolayer to bulk is investigated, revealing a redshift of the A(1g) mode at 162.4 cm(-1). Moreover, the long-term environmental stability of approximate to 2.4 nm thick Bi2O2Se is confirmed after exposing the sample for 1.5 years to air. The backgated field effect transistor (FET) based on a few-layered Bi2O2Se flake represents decent carrier mobility (approximate to 287 cm(2) V(-1)s(-1)) and an ON/OFF ratio of up to 10(7). This report indicates a technique to grow large-domain thickness controlled Bi2O2Se single crystals for electronics.

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