Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 12, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/1361-6595/acacc4
Keywords
TD-LAS; helium metastable; time resolved; magnetron discharge
Categories
Funding
- French National Research Agency (ANR) as part of the 'Investissement d'Avenir' Program [ANE-ITE-002-01]
Ask authors/readers for more resources
This study applies tunable diode laser absorption spectroscopy to measure the density and gas temperature of helium metastable (2(3)S(1)) in the ionization region of magnetron discharge. It finds that the higher the gas temperature, the lower the discharge peak current.
Tunable diode laser absorption spectroscopy is applied to measure the density and gas temperature of helium metastable (2(3)S(1)) in the ionization region of magnetron discharge operated at very high current density (> 10 Acm(-2)), which is achievable in helium at 10 Pa with molybdenum target. Those measurements were combined to electrical characterization of the current and the voltage at the magnetron cathode. The discharge current waveform is anti-correlated with the time-evolution of helium metastable (He-m) density showing that the main depletion process of He-m is its ionization. Counterintuitively, the higher the gas temperature the lower the discharge peak current. Gas rarefaction and gas recycling are discussed as major contributors for this phenomenon in very high current glow discharge.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available