Journal
PHYSICS OF PLASMAS
Volume 30, Issue 1, Pages -Publisher
AIP Publishing
DOI: 10.1063/5.0130672
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A 1D model of glow low-pressure CO2 discharges was developed and used to simulate stationary and repetitively pulsed discharges. The plasma characteristics obtained from the model were compared with experimental results and data from an approximate 0D approach. The agreement between the measured and calculated CO molar fraction was achieved by modifying the expression of the dissociation rate constant in the 1D model.
A 1D model of glow low-pressure CO2 discharges is developed. In the framework of this model, simulation of stationary and repetitively pulsed discharges at pressure ranging from 0.5 to 5 Torr and current from 10 to 50 mA is performed. The obtained plasma characteristics are compared with the available experimental results and with the data evaluated based on the approximate 0D approach. The results of 0D and 1D calculations agree for most of plasma parameters, except for the molar fraction of CO molecules produced at CO2 dissociation by electron impact. Agreement between the measured and calculated, in the framework of the 1D model, values of the CO molar fraction is provided by modifying the expression of the dissociation rate constant vs the reduced electric field.
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