Journal
OPTICS AND LASER TECHNOLOGY
Volume 157, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2022.108618
Keywords
Interference; Femtosecond; Biperiodic microstructure
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The letter proposes a processing method based on laser-induced backward transfer (LIBT) technique, where the sample is placed in a bound state to achieve equal-thickness interference, and laser direct writing (LDW) ablation and interference effect are combined to induce 2D biperiodic microstructures. The effects of laser power and interference pattern on the microstructures are studied.
With the increasing functional applications of periodic micro/nanostructures, it is necessary to provide simple and fast micromachining methods. It is very common to fabricate one-dimensional periodic structures based on one-step machining. However, it is difficult to rapidly process two-dimensional (2D) structures with multiple periods in one step. In this letter, we proposed a processing method based on laser-induced backward transfer (LIBT) technique, in which the sample is placed in a bound state, resulting in equal-thickness interference. Therefore, laser direct writing (LDW) ablation and interference effect are combined to induce 2D biperiodic microstructures. The effects of laser power and interference pattern on the 2D microstructures are studied. This is a promising method for fabricating 2D multiperiodic micro/nanostructures.
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