4.8 Article

Micropattern of Silver/Polyaniline Core-Shell Nanocomposite Achieved by Maskless Optical Projection Lithography

Journal

NANO LETTERS
Volume 22, Issue 24, Pages 9823-9830

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.2c02528

Keywords

maskless optical projection lithography; femtosecond laser; conductive polymer; polyaniline; Ag nanoparticles; nanocomposites

Funding

  1. National Natural Science Foundation of China (NSFC) [61975213, 51901234, 51673208]
  2. International Partnership Program of Chinese Academy of Sciences [GJHZ2021130]
  3. National Key R&D Program of China [2017YFB1104300]
  4. China, CAS [GJHZ1720]
  5. Austria, FFG [GJHZ1720]

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With the development of device miniaturization, there is a demand for a flexible and fast method to prepare microstructures with desired patterns. In this study, a novel photoreduction-polymerization method is developed for preparing conductive metal-polymer patterns. Ag/polyaniline nanocomposites are synthesized using maskless optical projection lithography technology, which demonstrates the surface-enhanced Raman scattering effect on the microstructures. This preparation method opens up new avenues for the fabrication of micro-nano devices such as sensors and detectors.
With the development of device miniaturization, a flexible and fast preparation method is in demand for achieving microstructures with desired patterns. We develop a novel photoreduction-polymerization method for preparing conductive metal-polymer patterns. Ag/polyaniline (PANI) nanocomposites have been successfully synthesized by maskless optical projection lithography (MOPL) technology, which is based on multiphoton absorption and the localized surface plasmon resonance (LSPR) effect. The individualized design and synthesis of the nanocomposite patterns at the micro-nano scale are flexibly realized on a variety of substrates. The surfaceenhanced Raman scattering (SERS) effect of Rhodamine 6G (R6G) is demonstrated on the microstructure of a square maze-shaped Ag/PANI nanocomposite. The electrical conductivity of the as-prepared nanocomposite is obtained. The preparation protocol proposed in this study opens up new avenues for the fabrication of micro-nano devices such as sensors and detectors.

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