4.6 Article

Physical vapour deposition of Zn2+doped NiO nanostructured thin films for enhanced selective and sensitive ammonia sensing

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Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2022.107198

Keywords

NiO film; Zn doping; Electronic sensitization; XPS study; RBS analysis; Ammonia sensor

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Highly sensitive and selective ammonia sensors were developed based on Zn2+ doped NiO thin films with controlled morphology through a substrate temperature variation using the electron beam evaporation method. The prepared films were systematically characterized and confirmed to have good structural and elemental attributes. The Zn: NiO sensors exhibited excellent selectivity towards ammonia at room temperature, with higher sensitivity observed for films deposited at higher temperatures. The incorporation of Zn into NiO enhanced the sensor's response through increased adsorption of oxygen on the surface.
Highly sensitive and selective ammonia sensors based on Zn2+ doped NiO thin films with well-controlled morphology through a substrate temperature variation developed with the electron beam evaporation method. The obtained films were systematically studied using various characterization techniques involving Xray Diffraction, FESEM, EDS, XPS, AFM, RBS, UV-visible spectrophotometer and Hall effect measurements. The successful preparation of Zn2+ doped NiO thin films has been confirmed by structural, elemental and chemical analysis. The fabricated Zn: NiO sensors have shown excellent selectivity towards ammonia at 100 ppm concentration at room temperature. Sensors deposited with high temperatures ((>= 300 degrees C) were more sensitive towards ammonia with a fast response and recovery time (10/15 s) and a low detection limit of 10 ppm. The enhanced ammonia sensing performance could be attributed to the high surface-to-volume ratio and high porosity of films deposited at substrate temperature (>= 300 degrees C), and electronic sensitization through Zn2+ incorporation into NiO lattice. The addition of Zn into NiO caused rapid adsorption of oxygen adsorbates on the surface of doped NiO, which increased the sensor's response. The sensing mechanism for the detection of ammonia is formulated. The outcome of this work opens a pathway for the efficient detection of ammonia at ambient temperature for numerous medical and industrial applications.

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