Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system

In this study, a novel tri-axial piezoelectric servo system is developed for micro/nano manufacturing considering the stroke, motion resolution, crosstalk, working bandwidth, compact structure, and position and pose modulation capability of cutting tool. A compliant mechanism which consists four compliant chains is designed based on trapezoidal leaf spring, X-type flexure hinge and right circular flexure hinge. The structure dimensional parameters are determined by finite element analysis (FEA) optimization method. Analytical modeling for compliance and dynamics are established and verified by FEA. Besides, the prototype of the developed tri-axial piezoelectric servo system was manufactured and experimentally tested. Testing results show that the high stroke, low parasitic motion, high motion resolution as well as the dynamic response can be obtained in terms of the compact structure. Moreover, the tracking control is conducted to demonstrate the controllability of the tri-axial piezoelectric servo system. Finally, the stability and feasibility of the developed system is verified by typical micro/nano structures manufacturing. CO 2022 Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http:// creativecommons.org/licenses/by-nc-nd/4.0/).

Automated summary

In this study, a novel tri-axial piezoelectric servo system is developed for micro/nano manufacturing, considering various factors. The dimensional parameters of the system are optimized through finite element analysis, and the compliance and dynamics of the system are verified. Experimental results show that the system has advantages such as high stroke, low parasitic motion, high motion resolution, and fast response, and the controllability of the system is demonstrated through tracking control.