Journal
ADVANCED MATERIALS
Volume 28, Issue 7, Pages 1441-1448Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201505111
Keywords
antireflection coatings; optical transmission; plasmonics; semiconductors; metallic films
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Funding
- National Science Foundation [DMR-1210398, DMR-1209761, CMMI 14-62946]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1209761, 1711849] Funding Source: National Science Foundation
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Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting buried metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.
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