4.7 Article

Microstructure, mechanical and high-temperature tribological properties of amorphous SiC films by pulsed magnetron sputtering

Related references

Note: Only part of the references are listed.
Article Materials Science, Coatings & Films

High-temperature tribological behavior of Ti containing diamond-like carbon coatings with emphasis on running-in coefficient of friction

Sukanta Bhowmick et al.

Summary: This study shows that incorporating titanium atoms into the structure of diamond-like carbon coatings can reduce the coefficient of friction and lessen running-in wear. Therefore, Ti-H-DLC exhibits good friction behavior at elevated temperatures and is suitable for manufacturing processes with high friction requirements.

SURFACE & COATINGS TECHNOLOGY (2022)

Article Materials Science, Coatings & Films

Improvement of the mechanical and the tribological properties of CrNbTiMoZr coatings through the incorporation of carbon and the adjustment of the substrate bias voltage

Shaofu Kuang et al.

Summary: In this study, a series of high-entropy alloy carbide coatings were successfully synthesized by tuning substrate bias voltages, with a continuous transformation in structure observed. The addition of carbon effectively reduced the friction coefficient and wear rate, achieving a high hardness, low friction coefficient, and low wear rate HEA carbide coating. This study provides valuable insights for designing new HEA coatings with high strength and low wear.

SURFACE & COATINGS TECHNOLOGY (2021)

Article Materials Science, Ceramics

Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films

Meng Liu et al.

Summary: By enlarging the distance between the target and substrate, this study achieved efficient coating and obtained SiC films with high modulus of elasticity and hardness.

CERAMICS INTERNATIONAL (2021)

Article Materials Science, Multidisciplinary

Structural and mechanical properties of amorphous Si-C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers

Qian Long et al.

Summary: The study explores the influence of sputtering power on the structural and mechanical properties of a-SiC thin films. It is found that increasing sputtering power leads to denser films with higher hardness and elastic modulus, reaching maximum values at 180 W. The research proposes a reason for the excellent mechanical properties based on theoretical analysis and experimental results.

VACUUM (2021)

Article Materials Science, Ceramics

Confinement induced variation of composition ratio in amorphous silicon carbide thin films and effect in optical properties

Aakash Mathur et al.

JOURNAL OF NON-CRYSTALLINE SOLIDS (2020)

Article Engineering, Multidisciplinary

Deposition of TiN and TiAlVN thin films by DC magnetron sputtering Composition, corrosion and mechanical study

Bassam Abdallah et al.

INTERNATIONAL JOURNAL OF STRUCTURAL INTEGRITY (2020)

Article Engineering, Multidisciplinary

Structural, optical and sensing properties of ZnS thick films deposited by RF magnetron sputtering technique at different powers

Bassam Abdallah et al.

WORLD JOURNAL OF ENGINEERING (2020)

Article Materials Science, Coatings & Films

The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering

Shumei Song et al.

SURFACE & COATINGS TECHNOLOGY (2019)

Review Engineering, Mechanical

High temperature solid-lubricating materials: A review

Shengyu Zhu et al.

TRIBOLOGY INTERNATIONAL (2019)

Article Materials Science, Multidisciplinary

Microstructure and mechanical properties of co-sputtered Al-SiC composites

Somya Singh et al.

MATERIALS & DESIGN (2019)

Article Materials Science, Multidisciplinary

Substrate bias effects on mechanical properties and high temperature oxidation performance of sputtered TiN-coated Zr-4

Dewen Tang et al.

JOURNAL OF NUCLEAR MATERIALS (2019)

Article Multidisciplinary Sciences

Deposition of Ti6Al4V Thin Films by DC Magnetron Sputtering: Effect of the Current on Structural, Corrosion and Mechanical Properties

B. Abdallah et al.

IRANIAN JOURNAL OF SCIENCE AND TECHNOLOGY TRANSACTION A-SCIENCE (2019)

Article Engineering, Biomedical

Effect of oxidation on intrinsic residual stress in amorphous silicon carbide films

Felix Deku et al.

JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART B-APPLIED BIOMATERIALS (2019)

Article Materials Science, Ceramics

Synthesis and structural evolution of hydrogenated amorphous silicon carbide thin film with carbon nanostructures

Mingming Li et al.

JOURNAL OF NON-CRYSTALLINE SOLIDS (2019)

Article Nanoscience & Nanotechnology

Enhanced Tribocorrosion Performance of Cr/GLC Multilayered Films for Marine Protective Application

Lei Li et al.

ACS APPLIED MATERIALS & INTERFACES (2018)

Article Materials Science, Ceramics

Tribological performance of SiC coating for carbon/carbon composites at elevated temperatures

Zishan Chen et al.

CERAMICS INTERNATIONAL (2018)

Article Nanoscience & Nanotechnology

High temperature characteristics of Al2024/SiC metal matrix composite fabricated by friction stir processing

Ali Hosseinzadeh et al.

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING (2018)

Article Materials Science, Coatings & Films

Tribochemistry dependent tribological behavior of superhard TaC/SiC multilayer films

Suxuan Du et al.

SURFACE & COATINGS TECHNOLOGY (2018)

Review Materials Science, Multidisciplinary

Microstructures and properties of high-entropy alloy films and coatings: a review

Wei Li et al.

MATERIALS RESEARCH LETTERS (2018)

Article Materials Science, Multidisciplinary

Structural alteration induced by substrate bias voltage variation in diamond-like carbon films fabricated by unbalanced magnetron sputtering

Morimasa Nakamura et al.

DIAMOND AND RELATED MATERIALS (2018)

Article Materials Science, Multidisciplinary

Effect of sputtering power on the structure and optical band gap of SiC thin films

Yong Cheng et al.

OPTICAL MATERIALS (2017)

Article Materials Science, Multidisciplinary

Effect of substrate temperature on structural and linear and nonlinear optical properties of nanostructured PLD a-SiC thin films

Partha P. Dey et al.

MATERIALS RESEARCH BULLETIN (2016)

Article Materials Science, Multidisciplinary

Low temperature deposition of a-SiC:H thin films applying a dual plasma source process

Tobias Frischmuth et al.

THIN SOLID FILMS (2016)

Article Materials Science, Multidisciplinary

Origin of temperature-induced low friction of sputtered Si-containing amorphous carbon coatings

O. Jantschner et al.

ACTA MATERIALIA (2015)

Article Materials Science, Coatings & Films

Tribomechanical and structural properties of a-SiC:H films deposited using liquid precursors on titanium alloy

K. C. F. Nass et al.

SURFACE & COATINGS TECHNOLOGY (2015)

Article Materials Science, Multidisciplinary

Effects of substrate bias on the structure and mechanical properties of (Al1.5CrNb0.5Si0.5Ti)Nx coatings

Wan-Jui Shen et al.

THIN SOLID FILMS (2012)

Article Materials Science, Multidisciplinary

Low-pressure synthesis and characterization of multiphase SiC by HWCVD using CH4/SiH4

F. Shariatmadar Tehrani et al.

VACUUM (2012)

Article Chemistry, Physical

A magnetron sputtering technique to prepare a-C:H films: Effect of substrate bias

Yongxia Wang et al.

APPLIED SURFACE SCIENCE (2011)

Article Materials Science, Ceramics

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

S. W. King et al.

JOURNAL OF NON-CRYSTALLINE SOLIDS (2011)

Article Materials Science, Multidisciplinary

Tribological properties of SiC coatings deposited by r.f. magnetron sputtering as a function of substrate temperature

N. Kumar et al.

PHILOSOPHICAL MAGAZINE LETTERS (2011)

Article Materials Science, Coatings & Films

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

V. Kulikovsky et al.

SURFACE & COATINGS TECHNOLOGY (2011)

Article Chemistry, Physical

Analysis of XPS spectra of Fe2+ and Fe3+ ions in oxide materials

Toru Yamashita et al.

APPLIED SURFACE SCIENCE (2008)

Article Materials Science, Coatings & Films

Influence of substrate bias on the composition of SiC thin films fabricated by PECVD and underlying mechanism

M. Wang et al.

SURFACE & COATINGS TECHNOLOGY (2007)

Article Materials Science, Coatings & Films

A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions

MMM Bilek et al.

SURFACE & COATINGS TECHNOLOGY (2006)

Article Instruments & Instrumentation

Effects of target bias voltage on the electrical conductivity of DLC films deposited by PBII/D with a bipolar pulse

S Miyagawa et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2006)

Article Materials Science, Multidisciplinary

Effect of substrate bias on β-SiC films prepared by PECVD

B Wang et al.

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY (2003)

Article Physics, Applied

Behavior of oxygen doped SiC thin films: An x-ray photoelectron spectroscopy study

A Avila et al.

JOURNAL OF APPLIED PHYSICS (2001)

Article Materials Science, Coatings & Films

Sputtered silicon carbide thin films as protective coating for MEMS applications

N Ledermann et al.

SURFACE & COATINGS TECHNOLOGY (2000)