Journal
IEEE SENSORS JOURNAL
Volume 23, Issue 4, Pages 3532-3540Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2023.3236039
Keywords
Sensors; Temperature sensors; Nanocomposites; Zinc oxide; II-VI semiconductor materials; Zinc; Temperature measurement; piezoelectric properties; polydimethylsiloxane; pressure sensor; zinc oxide (ZnO) nanotetrapods (ZNTs)
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A flexible pressure sensor with co-planar electrodes was fabricated using piezoelectric nanocomposites made from PDMS and ZnO nanotetrapods (ZNTs) fillers. The sensors showed a linear response to external pressure and increased sensitivity with higher growth temperature and ZNTs filler concentration. The sensor demonstrated potential applications in hand gesture and speech recognition.
A flexible pressure sensor with co-planar electrodes was fabricated based on piezoelectric nanocomposites by the combination of polydimethylsiloxane (PDMS) base polymer with zinc oxide (ZnO) nanotetrapods (ZNTs) fillers. ZNTs were synthesized by an oxidation process of Zn powder at different temperatures over 900 ? in air, and its crystallinity and structural morphology could be controlled effectively by the growth temperature based on scanning electron microscopy, X-ray diffraction, and photoluminescence spectroscopy analyses. The effects of the growth temperature and filler concentration of ZNTs on the piezoelectric properties of the nanocomposite sensors were investigated. The sensors exhibit a good linear response to external pressure less than 14 N, and the sensitivity increases with the increase of the growth temperature and ZNTs filler concentration due to the improvement in the crystallinity, the aspect ratio of T-arms, and the interconnectivity between ZNTs/ZNTs interfaces in the nanocomposite film. The sensor can be employed to detect human movements such as bending/stretching motions of fingers and the vibration of vocal cords. It is demonstrated that the sensor has potential applications in hand gesture and speech recognition.
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