Journal
IEEE ELECTRON DEVICE LETTERS
Volume 44, Issue 3, Pages 540-543Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2023.3240836
Keywords
Electrets; Vibrations; Voltage; Surface charging; Silicon; Electric potential; Electrostatics; Energy harvesting; microelectromechanical systems (MEMS); self-charge; electret; perforated electrode
Categories
Ask authors/readers for more resources
The electrostatic vibration energy harvester (e-VEH) is designed and fabricated with built-in silicon tips and perforated electrode based on MEMS technology. The integrated micro-tips effectively recharge the electret surface without separating the assembled device. Through-holes on the fixed electrode also optimize the energy harvesting performance. After self-charging, the fabricated device yields an output voltage of 6.2 V at a low driving frequency of 75 Hz, suggesting promising applications for self-powered electronics.
The electrostatic vibration energy harvester (e-VEH) typically comprises a variable capacitor, whereas the electret layer provides a bias voltage during vibration. However, the charge stored in electret may significantly decay in high temperature or other harsh environments. Recovering the surface charge in electret without taking apart the brittle packaged device remains a technical challenge. In this work, e-VEHs are designed and fabricated with built-in silicon tips and perforated electrode based on MEMS technology. The integrated micro-tips could effectively recharge the electret surface without separating the assembled device. Through-holes on the fixed electrode also optimize the energy harvesting performance. After self-charging, the fabricated device yields an output voltage of 6.2 V at a low driving frequency of 75 Hz, suggesting promising applications for self-powered electronics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available