Waveguide integration of a > 4.7-THz quantum-cascade laser

Waveguide integration of terahertz quantum cascade lasers (THz QCLs) is demonstrated at frequencies above 4.7 THz. A precision micromachining technique, followed by diamond-turning and electroless-plating has been used to manufacture hollow rectangular waveguides with integrated diagonal feedhorns. It is shown that surface roughness at the approximate to 1 mu m level is achieved, enabling outcoupling of radiation in the 4.75-5.05 THz band, with a divergence angle of < 5 degrees along the plane of the QCLs substrate.

Automated summary

Waveguide integration of terahertz quantum cascade lasers (THz QCLs) is achieved above 4.7 THz frequencies. A fabrication method involving precision micromachining, diamond-turning, and electroless-plating is utilized to manufacture hollow rectangular waveguides with diagonal feedhorns integrated. The surface roughness at the level of approximately 1 μm is attained, allowing radiation outcoupling in the 4.75-5.05 THz band with a divergence angle less than 5 degrees along the QCLs substrate plane.