Journal
ELECTRONICS LETTERS
Volume 59, Issue 2, Pages -Publisher
WILEY
DOI: 10.1049/ell2.12703
Keywords
microwave technology; substrate integrated waveguides; submillimetre wave integrated circuits; terahertz wave devices; terahertz wave generation; quantum cascade lasers; waveguide components
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Waveguide integration of terahertz quantum cascade lasers (THz QCLs) is achieved above 4.7 THz frequencies. A fabrication method involving precision micromachining, diamond-turning, and electroless-plating is utilized to manufacture hollow rectangular waveguides with diagonal feedhorns integrated. The surface roughness at the level of approximately 1 μm is attained, allowing radiation outcoupling in the 4.75-5.05 THz band with a divergence angle less than 5 degrees along the QCLs substrate plane.
Waveguide integration of terahertz quantum cascade lasers (THz QCLs) is demonstrated at frequencies above 4.7 THz. A precision micromachining technique, followed by diamond-turning and electroless-plating has been used to manufacture hollow rectangular waveguides with integrated diagonal feedhorns. It is shown that surface roughness at the approximate to 1 mu m level is achieved, enabling outcoupling of radiation in the 4.75-5.05 THz band, with a divergence angle of < 5 degrees along the plane of the QCLs substrate.
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