Journal
APPLIED SURFACE SCIENCE
Volume 604, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2022.154149
Keywords
Infrared transparent conductor; Electromagnetic shielding; Thermal stability; Sn-doped In2O3; Al2O3
Categories
Funding
- Defense Acquisition Program Administration (DAPA)
- Agency for Defense Development (ADD) of Korea [UD200016GD]
- National R & D programs of the National Research Foundation of Korea - Ministry of Science and ICT [NRF-2021M3F3A2A03015439, NRF-2021R1C1C1005042, NRF-2018R1A5A1025511, NRF-2020M3F3A2A02082437]
- DGIST R & D Program of the Ministry of Science and ICT of Korea [22-HRHR +-05, 22-CoE-NT-02, 21-HRHR-06]
- Samsung Electronics Co., Ltd
- National Research Foundation of Korea [22-COE-NT-02, 22-HRHR-05, 22-HRHR+-05, 21-HRHR-06] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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The study demonstrates the high infrared transmittance (>50% at 4-mu m-wavelength), low sheet resistance (<200 Omega square(-1) at room temperature), and high shielding effectiveness (similar to 16.2 dB at 10 GHz for the X-band) of 20-90-nm-thick Sn-doped In2O3 films deposited on an (0001)-oriented Al2O3 substrate. The multifunctional Sn-doped In2O3 films on Al2O3 substrates have potential applications in military, circuitry, windows, sensors, and transparent solar cells.
The transparency of most electromagnetic shielding conductors is limited to the visible regime. Here, we demonstrate the high infrared transmittance (>50% at 4-mu m-wavelength), low sheet resistance (<200 Omega square(-1) at room temperature), and high shielding effectiveness (similar to 16.2 dB at 10 GHz for the X-band) of 20-90-nm-thick Sn-doped In2O3 films deposited on an (0001)-oriented Al2O3 substrate. The phase persists even at 700 degrees C in air. Thus, multifunctional Sn-doped In2O3 films on Al2O3 substrates will advance technology in the areas of military applications, invisible circuitry, smart windows, infrared sensors, and transparent solar cells working in extreme environment.
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