Silicon surface patterning by regular stripes of laser-induced periodic surface structures

Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.

Automated summary

This study reports the formation of laser-induced periodic surface structures (LIPSS) on the surface of mono-crystalline silicon under specific fabrication conditions. Using a femtosecond laser, LIPSS-covered areas were organized into stripes perpendicular to the scanning direction. The formation process of LIPSS stripes was examined and an explanation based on interpulse feedback from amorphized areas was proposed.