Journal
APPLIED OPTICS
Volume 62, Issue 2, Pages 291-297Publisher
Optica Publishing Group
DOI: 10.1364/AO.475940
Keywords
-
Categories
Ask authors/readers for more resources
This paper studies the morphology change of etched microchannels in fused silica by controlling the laser scan speed. It is found that there is a significant difference between the chemical etched length and volume. The fabricated microchannels gradually become tapered along the scan direction.
Microchannels fabricated by femtosecond laser-assisted chemical etching are of great use in biochemical analysis. In this paper, we study the morphology change of etched microchannels in fused silica by controlling the laser scan speed, and we find a significant difference between the chemical etched length and volume. The fabricated microchannels would gradually become tapered along the scan direction, which influences the flow of the hydrofluoric (HF) reagent and the etching rate. As a result, the difference ratios of the etched length and volume, respectively, reach -5.56% and -41.83% followed by the scan speed increasing from 5 to 200 mu m/s. Microchannels with polarization independence and better aspect ratio could be obtained in a high-speed-scan mode. We suggest that laser-induced structural transformation from interconnected microcracks to nanogratings could be responsible for this change. Aforementioned results offer a feasible approach to achieve polarization-independent microchannels, which is in favor of accelerating the fabrication of three-dimensional microfluidic devices. (c) 2023 Optica Publishing Group
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available