Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 25, Issue 2, Pages 286-296Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2514092
Keywords
Accelerometer; mode localization; weakly coupled resonators; inertial sensors
Categories
Funding
- Chinese National Science Foundation [51575454]
- 111 Project [B13044]
Ask authors/readers for more resources
This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established and verified. The measured relative shift in amplitude ratio (similar to 312162 ppm/g) is 302 times higher than the shift in resonance frequency (similar to 1035 ppm/g) within the measurement range of +/- 1 g. The measured resolution based on the amplitude ratio is 0.61(mg and the nonlinearity is similar to 3.5% in the open-loop measurement operation. [2015-0247]
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available