Journal
ACS PHOTONICS
Volume 10, Issue 7, Pages 2208-2215Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.2c01046
Keywords
GaN; microdisk laser; Si(100); optical confinement; internal absorption loss; junction temperature
Categories
Funding
- National Key R&D Program of China [2021YFB3601600]
- Guangdong Province Key-Area Ramp
- D Program [2019B090917005, 2020B010174004, 2019B090904002, 2019B090909004]
- Natural Science Foundation of China [61874131, 62074158, 62174174, 62274177, 62275263]
- Jiangxi Double Thousand Plan [S2018CQKJ0072]
- Jiangxi Science and Technology Program [20212BDH80026]
- Strategic Priority Research Program of CAS [XDB43000000, XDB43020200]
- Key Research Program of Frontier Sciences, CAS [QYZDB-SSW-JSC014, ZDBS-LYJSC040]
- Bureau of International Cooperation, CAS [121E32KYSB20210002]
- Key R&D Program of Jiangsu Province [BE2021051, BE2020004-2]
- Suzhou Science and Technology Program [SJC2021002]
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GaN-based microdisk laser monolithically integrated on Si(100) with lower junction temperature and narrow spectral line width was successfully fabricated using wafer bonding and substrate removal.
GaN-based microdisk laser on Si can be adopted as an efficient on-chip laser source for Si photonics. However, most of the reported microdisk lasers are integrated on Si(111), which is not fully compatible with cost-effective mainstream complementary metal-oxide-semiconductor (CMOS) foundries. In this study, GaN-based microdisk laser monolithically integrated on Si(100) is carefully designed and fabricated thorough wafer bonding and substrate removal. Moreover, it shows 66.5% lower junction temperature due to reduced electric injection power and thermal resistance as compared with the reported conventional GaN-based microdisk lasers grown on Si(111). The result is the room-temperature continuous-wave current-injected lasing of GaN-based microdisk laser on Si(100), showing a narrow spectral line width of about 0.16 nm and an obvious turning point in the optical output power versus injection current curve.
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