Journal
MICROMACHINES
Volume 13, Issue 9, Pages -Publisher
MDPI
DOI: 10.3390/mi13091509
Keywords
silicon photonics; phase shifters; MEMS; thermo-optics; free-carrier-depletion; photonic accelerator; on-chip spectrometer; neuromorphic computing
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Funding
- Singapore Ministry of Education [MOE2019T2-2-104]
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In this review, the development and applications of silicon photonic phase shifters were discussed. Different types of phase shifters were introduced, and their working principles were analyzed. The related research work was summarized and compared. Additionally, the emerging applications of phase shifters were presented, and a discussion on each type of phase shifter was provided based on the figures of merit.
With the development of silicon photonics, dense photonic integrated circuits play a significant role in applications such as light detection and ranging systems, photonic computing accelerators, miniaturized spectrometers, and so on. Recently, extensive research work has been carried out on the phase shifter, which acts as the fundamental building block in the photonic integrated circuit. In this review, we overview different types of silicon photonic phase shifters, including micro-electro-mechanical systems (MEMS), thermo-optics, and free-carrier depletion types, highlighting the MEMS-based ones. The major working principles of these phase shifters are introduced and analyzed. Additionally, the related works are summarized and compared. Moreover, some emerging applications utilizing phase shifters are introduced, such as neuromorphic computing systems, photonic accelerators, multi-purpose processing cores, etc. Finally, a discussion on each kind of phase shifter is given based on the figures of merit.
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