Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror

In the process of manufacturing the world's largest silicon carbide (SiC) aspheric mirror, the primary difficulties are mirror blank preparation, asphere fabrication, and testing, as well as cladding and coating. Specifically, the challenges include the homogeneity of the complicated structure casting, accuracy and efficiency of the fabrication process, print-through effect, fidelity and precision of test procedure, stress and denseness of cladding process, the dynamic range of interferometric measurement, and air turbulence error due to the long optical path. To break through such a barrier of difficulties, we proposed the water-soluble room temperature vanishing mold and gel casting technology, homogeneous microstructure reaction-formed joint technology, nano-accuracy efficient compound fabrication, gravity unloading technology, high-denseness low-defect physical vapor deposition (PVD) Si-cladding technology, test data fusion method, and time-domain averaging method, etc. Based on the proposed technologies and methods, we have accomplished the world's largest SiC aspheric mirror with a size of empty set4.03 m. The impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric mirror. The aerial density of the SiC blank is less than 120 kg/m(2), surface shape test accuracy is better than 6 nm RMS, thickness inhomogeneity of the cladding layer is less than 5%, and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS, respectively.

Automated summary

The process of manufacturing the world's largest silicon carbide (SiC) aspheric mirror involves various challenges, including the preparation of the mirror blank, asphere fabrication, testing, cladding, and coating. To overcome these difficulties, a range of innovative technologies and methods were proposed and successfully applied to produce a SiC aspheric mirror with impressive performance. The completed mirror demonstrates outstanding characteristics, such as low aerial density, high accuracy in shape testing, and low surface figure error and roughness.