Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography

Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.

Automated summary

Nanostructures called nanoantennas show potential for color printing and filtering with sub-wavelength resolution. This study evaluates the color quality produced by large size nanoantenna arrays fabricated on a 12-inch wafer. The results indicate that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained using this mass-manufacturing-ready fabrication process. The findings provide a solid foundation for the potential industrial adoption of this emerging technology and reveal the limits and challenges of the process.