4.6 Article

Efficient and compact sol-gel TiO2 thermo-optic microring resonator modulator

Journal

OPTICAL MATERIALS EXPRESS
Volume 12, Issue 10, Pages 4061-4071

Publisher

Optica Publishing Group
DOI: 10.1364/OME.472722

Keywords

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Funding

  1. National Key Research and Development Program of China [2019YFB2203003]
  2. National Natural Science Foundation of China [12104375, 62175202]
  3. Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang [2020R01005]
  4. Natural Science Foundation of Zhejiang Province [LD22F040002]
  5. MOE Frontier Science Center for Brain Science amp
  6. Brain-Machine Integration, Zhejiang University

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By utilizing the sol-gel TiO2 platform, the research team achieved highly efficient TO tunable microring resonators in the 1310-nm waveband, with a high thermal tuning efficiency and TO modulator figure of merit, providing a new research direction for photonic integrated circuits and other applications.
Thermo-optic (TO) modulators play an increasingly important role in wavelength routers, lidar, optical computing, and other reconfigurable photonic systems. Highly efficient TO tunable microring resonators (MRRs) were first demonstrated based on a sol-gel TiO2 platform in the 1310-nm waveband owing to the synergistic effect between the TiO2 core and SU-8 cladding with both the negative thermo-optical coefficients. The MRR modulator with SU-8 polymer as the top cladding layer exhibits a thermal tuning efficiency of 33.0 pm/mW, which is more than 14 times higher than that with silica top cladding. Its rise/fall times of 9.4 us/24 us and a P pi power of 7.22 mW were achieved, indicating a relatively high TO modulator figure of merit among noncrystalline material platforms allowing monolithic integration on different substrates. These results yield a strong promise for applying the sol-gel TiO2 platform in photonic integrated circuits and suggest a new angle of view to design compact and efficient TO modulators in wearable devices, visible/infrared communication, and biophotonic applications.

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