Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and mo-lybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.

Automated summary

Microscopy and diffraction measurements were conducted on ultrathin binary alloy films of ruthenium and molybdenum obtained through standard sputter deposition. The films were found to be amorphous for compositions close to Ru50Mo50, accompanied by a significant reduction in roughness compared to equally thick films of either ruthenium or molybdenum. This reduction is attributed to the absence of the characteristic grain structure found in polycrystalline films of the individual elements.