4.7 Article

On-chip centrifuge using spiral surface acoustic waves on a ZnO/glass substrate

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 347, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2022.113901

Keywords

Surface acoustic waves; Zinc oxide (ZnO); On-chip centrifuge; Acoustofluidics; Particle enrichment

Funding

  1. National Natural Science Foundation of China
  2. Fundamental Research Funds for the Central Universities
  3. [11934009]
  4. [11974179]
  5. [11874216]
  6. [020414380178]

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This paper presents the fabrication and performance of a glass-based centrifuge using acoustic methods. By controlling the driving voltage and solvent recipe, efficient enrichment of particles and cells with different diameters can be achieved. This centrifuge shows great potential in the enrichment of micro- and nanoparticles as well as rare samples.
On-chip centrifuges based on acoustic methods have promising applications in biomedicine, environmental protection, and food testing. Glass materials are ideal for microfluidics because of their low cost, chemical inertness, thermal stability, and excellent optical transmission. This paper demonstrates a glass-based, efficient, and controllable particle centrifuge. A circular interdigital transducer with spiral electrodes was fabricated on a composite substrate of ZnO film and quartz glass (QG), generating an omnidirectional spiral surface acoustic wave field. A vorticity field was generated in a sessile droplet, and controlled concentrations of polystyrene particles with different diameters and Hela cells in the droplet were achieved. A linear relationship was observed between the driving voltage and the field amplitude, and in turn, between the voltage and the streaming velocity. The performance of the device can be improved by tuning the driving voltage or the recipe of the solvent. The ZnO/QG-based centrifuge shows good performance in enriching micron/submicron particles and cells and is compatible with optical tools, offering good promise in enriching low abundance micro-and nanoparticles, especially in rare samples.

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