Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 346, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2022.113878
Keywords
4H-SiC; Nanowire arrays; UV photodetectors; Fast response; High-temperature stability
Funding
- National Natural Science Foundation of China [11875032, 21902096, 51802184]
- Key Research and Development Program of Shaanxi Province, China [2022JM-373, 2021GY-221, 2021SF-502]
- Youth Talent Invitation Scheme of Shaanxi Association for Science and Technology [20190506]
- National Key Research and Development Program of China [2021YFB3200100]
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In this study, solar blind photodetectors (PDs) based on 4H-SiC nanowire arrays were developed, demonstrating excellent performance and stability.
Wide band gap semiconductor 4H-SiC has been considered as the most promising candidate for developing solar blind ultraviolet (UV) photodetectors (PDs). However, the absence of PDs constructed by the desired 4H-SiC nanostructures greatly limits their performance and practical application. In this study, the free-standing 4H-SiC bamboo-like nanowire arrays with an even diameter/height of 30 nm/35 mu m prepared by the anodic oxidation of 4H-SiC bulk single crystal in a top-down manner are used to develop the solar-blind PDs. Experiment results reveal that the developed PDs can have an excellent solar-blind detection performance such as high sensitivity to 275 and 365 nm UV light, a considerable light-dark ratio (similar to 44.3), remarkably low dark current, fast response (47.3 ms), excellent repeatability and stability. Additionally, the unencapsulated PDs can have an excellent high-temperature stability up to 300 degrees C. It is expected that the 4H-SiC nanowire arrays-based PDs can have more potential than their counterpart bulk material for the future optoelectronic device applications.
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