Journal
SENSORS
Volume 22, Issue 19, Pages -Publisher
MDPI
DOI: 10.3390/s22197444
Keywords
eddy current displacement sensor; linear-curve fitting; temperature compensation
Funding
- Hiwin Company
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A systematic approach is used to design and analyze a small-sized eddy current displacement sensor. Simulations are conducted to optimize its winding structure and dimensions. A linear fitting method is developed to convert the AC displacement signal to a DC signal. Additionally, a compensation method is proposed to reduce the temperature drift of the sensor at different operating temperatures.
A systematic method is employed for the design and analysis of a small size eddy current (EC) displacement sensor. Simulations are first performed to determine the optimal winding structure and dimensions of the sensor. A linear-fitting approach is then developed for converting the AC displacement signal of the sensor to a DC signal. Finally, a compensation method is proposed for mitigating the temperature drift of the EC sensor under different working temperatures. The experimental results show that the proposed sensor has a sensitivity of approximately 3 mu m, a working temperature range of 25-55 degrees C, and a linearity of +/- 1.025%.
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