High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure

A high-frequency surface acoustic wave (SAW) resonator, based on sandwiched interdigital transducer (IDT), is presented. The resonator has the structure of diamond/AlN/IDT/AlN/diamond, with Si as the substrate. The results show that its phase velocity and electromechanical coupling coefficient are both significantly improved, compared with that of the traditional interdigital transduce-free surface structure. The M2 mode of the sandwiched structure can excite an operation frequency up to 6.15 GHz, with an electromechanical coupling coefficient of 5.53%, phase velocity of 12,470 m/s, and temperature coefficient of frequency of -6.3 ppm/degrees C. This structure provides a new ideal for the design of high-performance and high-frequency SAW devices.

Automated summary

This article introduces a high-frequency SAW resonator based on a sandwiched structure, which improves its phase velocity and electromechanical coupling coefficient for better performance. The sandwiched structure can achieve an operating frequency of up to 6.15 GHz, with high electromechanical coupling coefficient and phase velocity, providing a new option for the design of high-performance and high-frequency SAW devices.