Journal
OPTICS EXPRESS
Volume 30, Issue 22, Pages 40044-40052Publisher
Optica Publishing Group
DOI: 10.1364/OE.472378
Keywords
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Categories
Funding
- Key Scientific Instrument and Equipment Development Projects of the Chinese Academy of Sciences
- Shanghai Science and Technology Development Foundation
- Science and Technology Commission of Shanghai Municipality
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- National Natural Science Foundation of China
- [YQYZZY0005]
- [21YF1455500]
- [2019SHZDZX01]
- [2020241]
- [2021230]
- [61801462]
- [61827823]
- [61971408]
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Mid-infrared single-photon detection is an important technology, and superconducting nanowire single photon detectors based on gamma-Nb4N3 film are more sensitive to low energy photons and have high detection efficiency.
Mid-infrared (MIR) single-photon detection is emerging as an important technology for various applications. Superconducting nanowire single photon detectors (SNSPDs) fabricated with superconducting films with energy gaps of a few meV are natural broadband single-photon detectors. Recently, extending SNSPDs' operation wavelengths into the MIR region is highly attractive. gamma-Nb4N3 has a reduced N content and lower energy gap than the commonly used delta-NbN, making SNSPDs based on gamma-Nb4N3 film more sensitive to low energy photons. We report on a Nb4N3-SNSPD based on 62-nm wide nanowire, with an optical absorption enhancement design and an optimized device package for efficient ZBLAN fiber coupling and dark count filtering. The developed device has a unity intrinsic detection efficiency (IDE) in the 1.5-4 mu m wavelength region, and the device detection efficiency at 2.95 mu m was measured to be 32.5%, with an uncertainty of 12.7%. Furthermore, we reduced the device geometry, and measured 3-10 mu m photon response of a device based on 5-nm film and 42-nm nanowire, with an IDE of 95%, 81%, 40%, and 6% for 4.8, 6, 8, and 10 mu m, respectively.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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