4.7 Article

Picosecond laser ablation of polycrystalline CVD diamond

Journal

OPTICS AND LASER TECHNOLOGY
Volume 155, Issue -, Pages -

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2022.108403

Keywords

CVD diamond; Picosecond laser; Surface topography; Microstructuring

Funding

  1. National Natural Science Foundation of China (NSFC) [52175412, 51805257]
  2. China Postdoctoral Science Foundation [:2019TQ0151]

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This study investigates the influence of laser parameters on the surface characteristics of chemical vapor deposition (CVD) diamond. Simulation is used to establish temperature field, thermal stress field, and phase field to explain the deterioration of diamond surface during laser machining. The results show that high temperature induced by laser and the local anisotropy of polycrystalline CVD diamond contribute to the uneven removal of materials, resulting in irregular gullies on the machined surface. The thermal effect of picosecond laser leads to the gasification of a large amount of material, with less accumulation in the processing area. Graphitization of diamond is induced in the groove, with less graphitization at the edge. Additionally, the CVD diamond surface undergoes oxidation and nitridation during laser ablation. By optimizing the machining parameters based on surface morphology and three-dimensional topography, different surface microstructures can be fabricated on CVD diamond.
In the present work, the influence of the laser parameters on the surface characteristics of chemical vapor deposition (CVD) diamond are investigated. The temperature field, thermal stress field and phase field are established through simulation to explain the heat affected zone that results in the deterioration of diamond surface in the process of laser machining. The high temperature induced by laser and the local anisotropy of polycrystalline CVD diamond contribute to the inhomogeneous materials removal, which results in irregular gullies on the machined surface, and the thermal effect of picosecond laser leads to the gasification of a large amount of material, where less accumulated products in the processing area appear. The graphitization of diamond is induced in the groove, where less graphitization appears at the edge of the groove. In addition, the CVD diamond surface is oxidized and nitrided during the laser ablation. By comparing the surface morphology and the three-dimensional topography of the groove, a set of machining parameters are optimized to fabricate different surface microstructures on CVD diamond.

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