Journal
OPTICAL AND QUANTUM ELECTRONICS
Volume 54, Issue 11, Pages -Publisher
SPRINGER
DOI: 10.1007/s11082-022-04071-2
Keywords
ZrO2 thin films; RF magnetron sputtering; AFM; Optical
Funding
- ACECR
Ask authors/readers for more resources
This study investigates the effect of deposition temperature on the surface morphology of zirconium dioxide layers using surface parameters obtained from atomic force microscopy analysis. The optical spectra transmission and transparency of the samples are also obtained.
Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO2) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available