4.7 Article

Mode interaction induced response flattening in two mechanically coupled micro-resonators

Journal

MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 177, Issue -, Pages -

Publisher

ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ymssp.2022.109164

Keywords

Nonlinear dynamics; Mode interaction; Micro-resonator; Internal resonance

Funding

  1. National Key R & D Program of China [2018YFB2002303]
  2. National Natural Science Foundation of China [12172323, 52075432]
  3. Zhejiang Provincial Natural Science Foundation of China [LZ22A020003]
  4. Program for Innovation Team of Shaanxi Province, People's Republic of China [2021TD-23]
  5. People?s Republic of China

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The paper investigates the dynamics of mode interaction in M/NEMS and its effect on tuning driving strength. Three stages of response in the coupled resonators are observed, and the amplitude relationship of the resonators for each stage is obtained. The theoretical study successfully explains previous observations, and an almost 1-order enhancement in amplitude stability is observed.
Mode interaction in M/NEMS arouses many interests in enhancing functionality in recent years. In this paper, the dynamics of two mechanically coupled micro-resonators with frequency ratio approximately 1:3 for tuning driving strength is investigated experimentally and analytically. Mode interaction induced three stages of response, i.e., typical Duffing response, large half flattened response and narrow full-flattened response, of the coupled resonators as driving strength increasing are observed. The amplitude relationship of two resonators for each stage is also obtained. The theoretical study based on the mathematical model successfully explains the previous observations. Almost 1-order enhancement of the amplitude stability in the response flattening range is observed finally, which makes the mechanical coupled micro-resonators brilliant candidate as an amplitude-sensing sensor.

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