Related references
Note: Only part of the references are listed.Effect of high temperature annealing on resistivity and temperature coefficient of resistance of sputtered platinum thin films of SiO2/Pt/SiOx interfaces
Timo Schoessler et al.
THIN SOLID FILMS (2020)
Influence of the pressure range on temperature coefficient of resistivity (TCR) for polysilicon piezoresistive MEMS pressure sensor
Samridhi et al.
PHYSICA SCRIPTA (2020)
Experimental investigation of thin film stress by Stoney's formula
Po-Yu Chen et al.
MEASUREMENT (2019)
Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors
Feng Yi et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015)
MEMS-based Pt film temperature sensor on an alumina substrate
Jie Han et al.
MATERIALS LETTERS (2014)
Optimization of sputtering parameters for Ni-Cr alloy deposition on copper foil as embedded thin film resistor
Lifei Lai et al.
SURFACE & COATINGS TECHNOLOGY (2013)
Typical R(T90) Characteristics of Platinum Thin-Film Resistance Thermometers in the Temperature Range from -50 °C to +660 °C
D. Boguhn et al.
INTERNATIONAL JOURNAL OF THERMOPHYSICS (2011)
Growth of platinum ultrathin films on Al2O3(0001)
O. Benamara et al.
SURFACE SCIENCE (2011)
Evaluation of platinum as a structural thin film material for RF-MEMS devices
P. Ekkels et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Stability of thin platinum films implemented in high-temperature microdevices
R. M. Tiggelaar et al.
SENSORS AND ACTUATORS A-PHYSICAL (2009)
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
G. C. A. M. Janssen et al.
THIN SOLID FILMS (2009)
The impact of thermal annealing and adhesion film thickness on the resistivity and the agglomeration behavior of titanium/platinum thin films
Ulrich Schmid
JOURNAL OF APPLIED PHYSICS (2008)
Effect of high temperature annealing on the electrical performance of titanium/platinum thin films
U. Schmid et al.
THIN SOLID FILMS (2008)
Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering
Monjoy Sreemany et al.
APPLIED SURFACE SCIENCE (2006)
Platinum and gold thin films deposited by filtered vacuum arc: morphological and crystallographic grain sizes
MC Salvadori et al.
SURFACE & COATINGS TECHNOLOGY (2006)
Contribution of the morphological grain sizes to the electrical resistivity of platinum and gold thin films
M Cattani et al.
SURFACE REVIEW AND LETTERS (2004)
Damage after annealing and aging at room temperature of platinized silicon substrates
MP Moret et al.
THIN SOLID FILMS (2003)
The electromechanical behavior of nichrome (80/20 wt.%) film
IH Kazi et al.
THIN SOLID FILMS (2003)
Anemometer with hot platinum thin film
F Mailly et al.
SENSORS AND ACTUATORS A-PHYSICAL (2001)
Share Paper
