4.4 Article

Ellipsometry: dielectric functions of anisotropic crystals and symmetry

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Optica Publishing Group
DOI: 10.1364/JOSAA.471958

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  1. US DOE, Office of Nuclear Energy [DE-AC-00OR22725]
  2. Oak Ridge National Laboratory
  3. Air Force Research Laboratory [FA9453-21-C-0056]

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This paper explores the determination of optical functions of anisotropic materials using generalized ellipsometry, focusing on the symmetry relations between cross-polarization coefficients (CPs) and crystal symmetry. The requirements for generalized ellipsometry and various ellipsometry measurement configurations are also discussed.
The optical functions of anisotropic materials can be determined using generalized ellipsometry, which can measure the cross-polarization coefficients (CPs) of the sample surface reflections. These CPs have several symmetry relations with respect to the symmetry of the crystal. This paper explores the symmetry relations of these CPs for uniaxial, orthorhombic, and monoclinic crystals and the requirements for generalized ellipsometry. Several ellipsometry measurement configurations are examined, including the requirements for the accurate measurements of the dielectric functions of anisotropic crystals. (c) 2022 Optica Publishing Group

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