Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 31, Issue 5, Pages 771-776Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2022.3191310
Keywords
Light emitting diodes; Metals; Fabrication; Resists; Electrodes; Stress; Strain; Light-emitting diode displays; flexible structures; microelectromechanical devices
Categories
Funding
- Innovation and Technology Commission of the Hong Kong Special Administrative Region (HKSAR) [ITS-192-20FP]
- Foshan Hong Kong University of Science and Technology (HKUST) [FSUST21-HKUST03B, FSUST21-FYTRI04B]
- Shenzhen-Hong Kong-Macau S&T Program (Category C) [SGDX20210823103200004]
- Research Grants Council of Hong Kong through the General Research Fund [16213019]
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In this study, a biaxially stretchable LED display was developed using a wavy structured-metal electrode grid and LED chips. The display showed excellent flexibility, being able to bend, roll, stretch, and even withstand washing without compromising image quality. This work demonstrated the potential of using inorganic materials and MEMS compatible processes for stretchable electronics fabrication.
In this work, we fabricated a biaxially stretchable light-emitting diode (LED) display based on a wavy structured-metal electrode grid packaged together with LED chips. The micro-electromechanical systems (MEMS) fabrication process was utilized to fabricate the wavy-structured metal connections and rigid islands. The resulting LED display can be readily bent, rolled, stretched and even washed with no degradation of its image quality. Here at least 1000 stretching cycles at a 10% strain can be tolerated. This work demonstrated the potential of inorganic materials as stretchable displays and MEMS compatible processes which can be used as stretchable electronics fabrication processes. 2022-0029
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