Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 924, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2022.166592
Keywords
Magnetron sputtering; Mechanical properties; H; E* ratio; (AlCrMoTaTi)Nx coating
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Funding
- National Natural Science Foundation of China [51601144, 52074219, 52005403]
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(AlCrMoTaTi)Nx nano-multilayer coatings with different N concentration were fabricated by varying the nitrogen flow rate using a closed field unbalanced magnetron sputtering. The phase structure changed with the nitrogen flow rate, resulting in different properties of the coatings.
(AlCrMoTaTi)Nx nano-multilayer coatings with different N concentration were deposited by varying the nitrogen flow rate using a closed field unbalanced magnetron sputtering. With the nitrogen flow rate increased from 0 sccm to 16sccm, the phase structure changed from a HCP metal phase to a mixed phase of HCP metal and FCC nitride, and then to a fully FCC nitride phase similar to B1-NaCl at the nitrogen flow rate above 12sccm. The (AlCrMoTaTi)Nx coatings formed nano-multilayer super lattice structure with modulation periods of about 2 nm. The FCC structured (AlCrMoTaTi)Nx coatings exhibited hardness ranging between 32.8 and 35.2 GPa, which was related to their superlattice structure with a small modulation period and the inverse Hall-Petch soften effect due to their small grain sizes. The FCC structured (AlCrMoTaTi)Nx coatings also exhibit higher H/E* ratios above 0.09 than that of monolayer binary, nano-multilayer and high entropy nitride coatings, which can be attributed to their moderate valence electron concentration that can not only preserves the formation of strong Me-N bonds but also enables the formation of Me-Me bonds.(c) 2022 Elsevier B.V. All rights reserved.
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