Journal
IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 9, Pages 1491-1494Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3189443
Keywords
Substrates; Silicon; Glass; Current density; Printing; Power generation; Metals; InGaN; red micro-LEDs; silicon substrate; transfer printing
Categories
Funding
- National Key Research and Development Program of China [2021YFB3601000, 2021YFB3601003, 2021YFE0105300]
- National Natural Science Foundation of China [61974031]
- Science and Technology Commission of Shanghai Municipality [21511101303]
- Leading-Edge Technology Program of Jiangsu Natural Science Foundation [BE2021008-2]
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The study achieved successful transfer printing of InGaN red micro-LEDs, which exhibited better performance by removing the silicon substrate and introducing a metal mirror. The transfer printed micro-LEDs showed significantly higher optical power and EQE compared to micro-LEDs on native substrate.
Red micro light-emitting diodes (micro-LEDs) on silicon substrates are important components for realizing large-scale and low-cost micro-LED displays. Recently, InGaN red micro-LEDs have received enormous attention because their external quantum efficiency (EQE) is not significantly affected by size effect and they are compatible with existing green and blue LED material systems. Here, taking advantage of the easy removal of silicon substrates, we successfully achieved the transfer printing of InGaN red micro-LEDs. By removing the light-absorbing Si substrate and introducing a metal mirror, the transfer printed micro-LEDs exhibited better color purity, higher optical power, and higher EQE. At 0.5 A/cm(2), the optical power of micro-LEDs on glass was 300% higher than that of micro-LEDs on silicon. And the peak EQE of transfer printed micro-LEDs was 2.3 times that of micro-LEDs on native substrate. This work is applicable to most transfer printing techniques requiring PDMS stamps, and shows the potential to realize InGaN-based full-color micro-LED displays by mass transfer in the future.
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