4.7 Article

Patterning the surface structure of transparent hard-brittle material β-Ga2O3 by ultrashort pulse laser

Journal

CERAMICS INTERNATIONAL
Volume 48, Issue 19, Pages 27650-27657

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2022.06.061

Keywords

Femtosecond laser; Single pulse; Patterning; Nonlinear absorption

Funding

  1. National Natural Science Foundation of China [52035009, 51761135106]
  2. 2020 Mobility Programme of the Sino-German Center for Research Promotion [M 0396]
  3. Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University
  4. '111' project by the State Administration of Foreign Experts Affairs [B07014]
  5. '111' project by the Ministry of Education of China [B07014]

Ask authors/readers for more resources

This paper investigates the micro/nanofabrication of transparent hard and brittle materials using femtosecond laser direct writing technology. By controlling the processing parameters, high-precision microholes, micro/nano-rectangular columns, and microchannels were successfully fabricated. This fast fabrication method has potential applications in sensing, photonics, or electronics.
Femtosecond laser direct writing technology offers a powerful and advantageous tool for precise three-dimensional (3D) micro/nanofabrication of transparent hard and brittle materials. In this paper, micro-craters, micro/nano-rectangular columns, and microchannels structures with different spatial characteristics are ach-ieved after irradiation of crystalline (100) beta-Ga2O3 via an optical-fiber femtosecond laser (515/1030 nm, 285 fs, 100 kHz) with different processing parameters in air ambient. Laser scanning confocal microscope, atomic force microscopy, and Raman spectroscopy are employed to characterize the roughness and constitutive property of the surface structure under tightly focused laser conditions. The influences of different pulse numbers and different pulse energies on the morphology of the pits were investigated. Through precise control and optimi-zation of processing parameters, the formation of cracks and chipping can be effectively avoided. Crack-free ablation holes with smooth edges were fabricated under low-energy (E = 22 nJ) single-pulse conditions. Furthermore, the effects of different laser processing parameters (single-pulse scanning interval, pulse number and scanning repetition times) on the microchannel morphology were also explored. From this work, high -precision micro-hole arrays, micro-nano rectangular column arrays, and microchannels were successfully fabricated on (100) beta-Ga2O3 substrates. Due to the interaction of single-pulse femtosecond laser with beta-Ga2O3 materials, this fast fabrication method of 3D submicron structures has potential applications in sensing, pho-tonics, or electronics.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.7
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available