A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process

Multilayer piezoelectric ceramics have wide application prospects in the fields of precision driving and intelligent sensing owing to their low driving voltages and large strains. However, high sintering temperatures and expensive noble metal electrodes limit their application as multilayer piezoelectric ceramic actuators (MLAs) in conventional devices. In this study, a modified piezoelectric ceramic powder and Ag inner electrode were used to prepare a low-cost MLA with a low sintering temperature of 900 degrees C. The MLA showed superior piezoelectric properties with d33 = 3015 pC/N and a large electric-field-induced strain of 0.13% at 22.2 kV/cm. Moreover, the stator of the ultrasonic motor composed of this MLA produced the ideal vibration mode, and the maximum rotation speed of the ultrasonic motor was 192 r/min under a 50 g load, which verifies the applicability of this component in practical minimised devices. These results demonstrate a strategy for fabricating low-cost and high-precision micro-actuators for precision driving.

Automated summary

In this study, a low-cost multilayer piezoelectric ceramic actuator (MLA) was prepared using a modified piezoelectric ceramic powder and Ag inner electrode, with a low sintering temperature of 900 degrees C. The MLA exhibited superior piezoelectric properties and a large electric-field-induced strain. Furthermore, the ultrasonic motor composed of this MLA showed ideal vibration mode and achieved a high maximum rotation speed under a load, demonstrating the applicability of this component in practical minimised devices. These findings provide a strategy for fabricating low-cost and high-precision micro-actuators for precision driving.