Journal
APL PHOTONICS
Volume 7, Issue 7, Pages -Publisher
AIP Publishing
DOI: 10.1063/5.0094056
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Funding
- National Natural Science Foundation of China [61988102]
- Research Grants Council of Hong Kong [14206717]
- Engineering and Physical Sciences Research Council (EPSRC) [EP/S021442/1, EP/V047914/1]
- Royal Society Wolfson Merit Award (EPM)
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Traditional terahertz spectroscopy methods have limitations in certain cases, while terahertz ellipsometry, as a self-reference characterization technique with wide adaptability, can be applied to almost all sample types.
In the past, terahertz spectroscopy has mainly been performed based on terahertz time-domain spectroscopy systems in a transmission or a window/prism-supported reflection configuration. These conventional approaches have limitations in regard to characterizing opaque solids, conductive thin films, multiple-layer structures, and anisotropic materials. Ellipsometry is a self-reference characterization technique with a wide adaptability that can be applied for nearly all sample types. However, terahertz ellipsometry has not yet been widely applied, mainly due to the critical requirement it places on the optical setting and the large discrepancy with regard to traditional terahertz spectroscopy and conventional optical ellipsometry. In this Tutorial, we introduce terahertz time-domain spectroscopic ellipsometry from the basic concept, theory, optical configuration, error calibration to characterization methods. Experimental results on silicon wafers of different resistivities are presented as examples. This Tutorial provides key technical guidance and skills for accurate terahertz time-domain spectroscopic ellipsometry. (c) 2022 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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